Recombination characteristics of single-crystalline silicon wafers with a damaged near-surface layer

von A. V. Sachenko, V. P. Kostylev, V. G. Litovchenko, V. G. Popov, B. M. Romanyuk, V. V. Chernenko, V. M. Naseka, T. V. Slusar, S. I. Kyrylova, F. F. Komarov
Veröffentlicht 2013