Сhanges in the structural state and properties of vacuum-arc coatings based on high-entropy alloy TiZrHfNbTa under the influence of nitrogen pressure and bias potential at depositi... von Sobol’, O.V., Andreev, A.A., Mygushchenko, R.P., Gorban’, V.F., Stolbovoy, V.A., Meylekhov, A.A., Subbotina, V.V., Kovteba, D.V., Zvyagolsky, A.V., Vuets, A.E.

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