Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition von M. T. Normuradov, Sh. T. Khozhiev, K. T. Dovranov, X. T. Davranov, M. A. Davlatov, F. K. Khollokov

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Development of a technology for the production of nano-sized heterostructured films by ion-plasma deposition von M. T. Normuradov, Sh. T. Khozhiev, K. T. Dovranov, X. T. Davranov, M. A. Davlatov, F. K. Khollokov

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