Oxygen activation effect on reactive magnetron synthesis of alumina coatings von Walkowicz, J., Zykov, A.V., Dudin, S.V., Yakovin, S.D.

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Oxygen activation effect on reactive magnetron synthesis of alumina coatings von Walkowicz, J., Zykov, A.V., Dudin, S.V., Yakovin, S.D.

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Plasma sterilization in low-pressure RF discharge von Lisovskiy, V.A., Yakovin, S.D., Yegorenkov, V.D., Terent’eva, A.G.

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