Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering von Yakovin, S., Zykov, A., Dudin, S., Yefymenko, N.

Volltext

Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride von Dudin, S., Yakovin, S., Zykov, A., Yefymenko, N.

Volltext

Investigation of interaction between ion-beam plasma and processed surface during the synthesis of tantalum diboride and pentaoxide von Yakovin, S., Zykov, A., Dudin, S., Dakhov, A., Yefymenko, N.

Volltext