Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering

by Yakovin, S., Zykov, A., Dudin, S., Yefymenko, N.
Published 2016

Discharge characteristics of combined low energy ion source – magnetron sputtering system

by Zykov, A., Yefymenko, N., Dudin, S., Yakovin, S.
Published 2020

Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride

by Dudin, S., Yakovin, S., Zykov, A., Yefymenko, N.
Published 2021

Investigation of interaction between ion-beam plasma and processed surface during the synthesis of tantalum diboride and pentaoxide

by Yakovin, S., Zykov, A., Dudin, S., Dakhov, A., Yefymenko, N.
Published 2019

Design and research of combined magnetron-ion-beam sputtering system

by Dudin, S., Tkachenko, O., Shchybria, A., Yakovin, S., Zykov, A., Yefymenko, N.
Published 2018