Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride

за авторством Dudin, S., Yakovin, S., Zykov, A., Yefymenko, N.
Опубліковано 2021

Discharge characteristics of combined low energy ion source – magnetron sputtering system

за авторством Zykov, A., Yefymenko, N., Dudin, S., Yakovin, S.
Опубліковано 2020

Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering

за авторством Yakovin, S., Zykov, A., Dudin, S., Yefymenko, N.
Опубліковано 2016

Investigation of interaction between ion-beam plasma and processed surface during the synthesis of tantalum diboride and pentaoxide

за авторством Yakovin, S., Zykov, A., Dudin, S., Dakhov, A., Yefymenko, N.
Опубліковано 2019

Design and research of combined magnetron-ion-beam sputtering system

за авторством Dudin, S., Tkachenko, O., Shchybria, A., Yakovin, S., Zykov, A., Yefymenko, N.
Опубліковано 2018