Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering von Yakovin, S., Zykov, A., Dudin, S., Yefymenko, N.

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Discharge characteristics of combined low energy ion source – magnetron sputtering system von Zykov, A., Yefymenko, N., Dudin, S., Yakovin, S.

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Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride von Dudin, S., Yakovin, S., Zykov, A., Yefymenko, N.

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Investigation of interaction between ion-beam plasma and processed surface during the synthesis of tantalum diboride and pentaoxide von Yakovin, S., Zykov, A., Dudin, S., Dakhov, A., Yefymenko, N.

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Design and research of combined magnetron-ion-beam sputtering system von Dudin, S., Tkachenko, O., Shchybria, A., Yakovin, S., Zykov, A., Yefymenko, N.

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