Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering by Yakovin, S., Zykov, A., Dudin, S., Yefymenko, N.

Get full text

Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride by Dudin, S., Yakovin, S., Zykov, A., Yefymenko, N.

Get full text

Investigation of interaction between ion-beam plasma and processed surface during the synthesis of tantalum diboride and pentaoxide by Yakovin, S., Zykov, A., Dudin, S., Dakhov, A., Yefymenko, N.

Get full text