Open Science Harvester of NAS of Ukraine

КЕРУВАННЯ КУТОВИМ РУХОМ КОСМІЧНОГО АПАРАТА ЗА ВЕКТОРНИМИ ВИМІРАМИ

by Yefymenko, N.V., Lutsenko, N.V.
Published 2025

Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering

by Yakovin, S., Zykov, A., Dudin, S., Yefymenko, N.
Published in Вопросы атомной науки и техники (2016)

Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride

by Dudin, S., Yakovin, S., Zykov, A., Yefymenko, N.
Published in Вопросы атомной науки и техники (2021)

Discharge characteristics of combined low energy ion source – magnetron sputtering system

by Zykov, A., Yefymenko, N., Dudin, S., Yakovin, S.
Published in Вопросы атомной науки и техники (2020)

Investigation of interaction between ion-beam plasma and processed surface during the synthesis of tantalum diboride and pentaoxide

by Yakovin, S., Zykov, A., Dudin, S., Dakhov, A., Yefymenko, N.
Published in Вопросы атомной науки и техники (2019)

Design and research of combined magnetron-ion-beam sputtering system

by Dudin, S., Tkachenko, O., Shchybria, A., Yakovin, S., Zykov, A., Yefymenko, N.
Published in Вопросы атомной науки и техники (2018)