Plasma potential influence on ion energy istribution function in icp source

by O. V. Vozniy, G. Y. Yeom, Yu. Kropotov
Published 2007

Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2

by I. N. Torianik, V. M. Beresnev, A. D. Pogrebnjak, O. V. Sobol, Ye. V. Beresneva, I. A. Podcherniaieva, Yu. Kropotov, N. G. Stiervoiedov, P. V. Turbin, D. A. Kolesnikov
Published 2013