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Simulation oh the ignition of a low pressure rf capacitive discharge
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Науковий фізико-технологічний центр МОН та НАН України
2003
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| Series: | Физическая инженерия поверхности |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/101836 |
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irk-123456789-1018362016-06-09T03:02:04Z Simulation oh the ignition of a low pressure rf capacitive discharge Lisovskiy, V.A. Booth, J.-P. 2003 Article Simulation oh the ignition of a low pressure rf capacitive discharge / V.A. Lisovskiy, J.-P. Booth // Физическая инженерия поверхности. — 2003. — Т. 1, № 1. — С. 34-36. — Бібліогр.: 4 назв. — англ. 1999-8074 http://dspace.nbuv.gov.ua/handle/123456789/101836 en Физическая инженерия поверхности Науковий фізико-технологічний центр МОН та НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| format |
Article |
| author |
Lisovskiy, V.A. Booth, J.-P. |
| spellingShingle |
Lisovskiy, V.A. Booth, J.-P. Simulation oh the ignition of a low pressure rf capacitive discharge Физическая инженерия поверхности |
| author_facet |
Lisovskiy, V.A. Booth, J.-P. |
| author_sort |
Lisovskiy, V.A. |
| title |
Simulation oh the ignition of a low pressure rf capacitive discharge |
| title_short |
Simulation oh the ignition of a low pressure rf capacitive discharge |
| title_full |
Simulation oh the ignition of a low pressure rf capacitive discharge |
| title_fullStr |
Simulation oh the ignition of a low pressure rf capacitive discharge |
| title_full_unstemmed |
Simulation oh the ignition of a low pressure rf capacitive discharge |
| title_sort |
simulation oh the ignition of a low pressure rf capacitive discharge |
| publisher |
Науковий фізико-технологічний центр МОН та НАН України |
| publishDate |
2003 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/101836 |
| citation_txt |
Simulation oh the ignition of a low pressure rf capacitive discharge / V.A. Lisovskiy, J.-P. Booth // Физическая инженерия поверхности. — 2003. — Т. 1, № 1. — С. 34-36. — Бібліогр.: 4 назв. — англ. |
| series |
Физическая инженерия поверхности |
| work_keys_str_mv |
AT lisovskiyva simulationohtheignitionofalowpressurerfcapacitivedischarge AT boothjp simulationohtheignitionofalowpressurerfcapacitivedischarge |
| first_indexed |
2023-10-18T20:03:34Z |
| last_indexed |
2023-10-18T20:03:34Z |
| _version_ |
1796148812181405696 |