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Kinetic processes in negative glow plasma of low pressure discharge in oxygen
It is shown that electron energy distribution function of negative glow plasma of low pressure discharge in oxygen exhibits two-temperature behavior due to the influence of metastable molecules O²(a¹Δg), O²(b¹Σ+g) and excitation of O² vibrational levels. As well, spatial dependencies of the atomic o...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2013
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/112186 |
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| Summary: | It is shown that electron energy distribution function of negative glow plasma of low pressure discharge in oxygen exhibits two-temperature behavior due to the influence of metastable molecules O²(a¹Δg), O²(b¹Σ+g) and excitation of O² vibrational levels. As well, spatial dependencies of the atomic oxygen concentration on the gas pressure and power density in the discharge plasma are determined by actinometry method. |
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