Magnetic field influence on the discharge parameters of two-stage gas-metal plasma source
The discharge parameters and vacuum regimes of the two-stage gas-metal plasma source are presented for three configurations of magnetic field. Distributions of deposited flows, current and voltage characteristics of the discharge, current characteristics for reflective electrodes and target are pr...
Збережено в:
| Дата: | 2016 |
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| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
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| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/115449 |
| Теги: |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Magnetic field influence on the discharge parameters of two-stage gas-metal plasma source / S.V. Shariy, V.B. Yuferov, M.O. Shvets, V.I. Tkachov, V.V. Katrechko // Вопросы атомной науки и техники. — 2016. — № 6. — С. 191-194. — Бібліогр.: 4 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | The discharge parameters and vacuum regimes of the two-stage gas-metal plasma source are presented for three
configurations of magnetic field. Distributions of deposited flows, current and voltage characteristics of the
discharge, current characteristics for reflective electrodes and target are presented. Discharge voltage is 30…150 V,
discharge current is up to 25 A. The gas discharge is initiated on air. Vapors of copper were used for discharges in
metal. The evaporation rates of copper are obtained at the level of 20…30 g/h. The results of study have shown that
mass distribution of flows deposited on the vacuum chamber walls significant deviated from Knudsen-Lamberg`s
law described of evaporation in vacuum. |
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