Numerical simulation of nanoparticles coagulation in RF-discharge
This paper presents the simulation results of nanoscale dust particles coagulation in capacitive radio-frequency discharge of low pressure in argon. Simulations carried out under the self-consistent kinetic model that takes into account the stochastic nature of the process of dust particles chargi...
Збережено в:
| Дата: | 2016 |
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| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
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| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/115461 |
| Теги: |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Numerical simulation of nanoparticles coagulation in RF-discharge / O.Yu. Kravchenko, Yu.V. Yushchyshena // Вопросы атомной науки и техники. — 2016. — № 6. — С. 272-275. — Бібліогр.: 10 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | This paper presents the simulation results of nanoscale dust particles coagulation in capacitive radio-frequency
discharge of low pressure in argon. Simulations carried out under the self-consistent kinetic model that takes into
account the stochastic nature of the process of dust particles charging and their coagulation using general dynamic
equations for aerosols. We analyze the distribution of dust particles by size and charge at different distances from
the electrodes. It is shown that a significant number of dust particles of opposite charges present in sheaths, which
improves the process of their coagulation, compared with the central region inter-electrode gap. It is shown that the
presence of dust particles increases the concentration of electrons in the discharge, as well as increases the average
electric potential drop in sheaths. |
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