Determination of surface defects by using the wavefront scanner
The possibility of changes in the polarization state of the laser beam reflected from inhomogeneity with the refractive index gradient is theoretically shown, which allows separating the phase shifts related with relief inhomogeneities and local changes of the surface refractive index. Modificati...
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| Дата: | 2010 |
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| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2010
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| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/117744 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Determination of surface defects by using the wavefront scanner / N.S. Goloborodko, V.I. Grygoruk, V.N. Kurashov, D.V. Podanchuk, A.A. Goloborodko, M.M. Kotov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 1. — С. 65-69. — Бібліогр.: 10 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-117744 |
|---|---|
| record_format |
dspace |
| spelling |
irk-123456789-1177442017-05-27T03:05:00Z Determination of surface defects by using the wavefront scanner Goloborodko, N.S. Grygoruk, V.I. Kurashov, V.N. Podanchuk, D.V. Goloborodko, A.A. Kotov, M.M. The possibility of changes in the polarization state of the laser beam reflected from inhomogeneity with the refractive index gradient is theoretically shown, which allows separating the phase shifts related with relief inhomogeneities and local changes of the surface refractive index. Modification of the wavefront scanner for analyzing the wavefront of the laser beam reflected from the samples’ surface is considered. The main idea of the method is to use the focused laser beams with different polarizations for illuminating separate areas of the surface. The results of detecting test surfaces with different structures by the wavefront scanner are presented. 2010 Article Determination of surface defects by using the wavefront scanner / N.S. Goloborodko, V.I. Grygoruk, V.N. Kurashov, D.V. Podanchuk, A.A. Goloborodko, M.M. Kotov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 1. — С. 65-69. — Бібліогр.: 10 назв. — англ. 1560-8034 PACS 42.15.Dp, 42.25.Bs, 42.30.Kq, 42.87.-d http://dspace.nbuv.gov.ua/handle/123456789/117744 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
The possibility of changes in the polarization state of the laser beam reflected
from inhomogeneity with the refractive index gradient is theoretically shown, which
allows separating the phase shifts related with relief inhomogeneities and local changes
of the surface refractive index. Modification of the wavefront scanner for analyzing the
wavefront of the laser beam reflected from the samples’ surface is considered. The main
idea of the method is to use the focused laser beams with different polarizations for
illuminating separate areas of the surface. The results of detecting test surfaces with
different structures by the wavefront scanner are presented. |
| format |
Article |
| author |
Goloborodko, N.S. Grygoruk, V.I. Kurashov, V.N. Podanchuk, D.V. Goloborodko, A.A. Kotov, M.M. |
| spellingShingle |
Goloborodko, N.S. Grygoruk, V.I. Kurashov, V.N. Podanchuk, D.V. Goloborodko, A.A. Kotov, M.M. Determination of surface defects by using the wavefront scanner Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Goloborodko, N.S. Grygoruk, V.I. Kurashov, V.N. Podanchuk, D.V. Goloborodko, A.A. Kotov, M.M. |
| author_sort |
Goloborodko, N.S. |
| title |
Determination of surface defects by using the wavefront scanner |
| title_short |
Determination of surface defects by using the wavefront scanner |
| title_full |
Determination of surface defects by using the wavefront scanner |
| title_fullStr |
Determination of surface defects by using the wavefront scanner |
| title_full_unstemmed |
Determination of surface defects by using the wavefront scanner |
| title_sort |
determination of surface defects by using the wavefront scanner |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
2010 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/117744 |
| citation_txt |
Determination of surface defects by using the wavefront scanner / N.S. Goloborodko, V.I. Grygoruk, V.N. Kurashov, D.V. Podanchuk, A.A. Goloborodko, M.M. Kotov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 1. — С. 65-69. — Бібліогр.: 10 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
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2023-10-18T20:30:31Z |
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