Silicon-on-insulator technology for microelectromechanical applications
A purpose of the paper is to give a review of recent development (1998-1999) in microelectromechanical (MEMS) devices formed on silicon-on-insulator (SOI) substrates. Advantages of using SOI are summarised. Problems of CMOS-MEMS integration for smart sensors are listed. Examples of successful use of...
Збережено в:
| Дата: | 1999 |
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| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
1999
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| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/117927 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Silicon-on-insulator technology for microelectromechanical applications / A.Y. Usenko, W.N. Carr // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 1. — С. 93-97. — Бібліогр.: 19 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-117927 |
|---|---|
| record_format |
dspace |
| spelling |
irk-123456789-1179272017-05-28T03:04:09Z Silicon-on-insulator technology for microelectromechanical applications Usenko, A.Y. Carr, W.N. A purpose of the paper is to give a review of recent development (1998-1999) in microelectromechanical (MEMS) devices formed on silicon-on-insulator (SOI) substrates. Advantages of using SOI are summarised. Problems of CMOS-MEMS integration for smart sensors are listed. Examples of successful use of SOI to fabricate advanced MEMS are given and future prospects MEMS on SOI are evaluated. 1999 Article Silicon-on-insulator technology for microelectromechanical applications / A.Y. Usenko, W.N. Carr // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 1. — С. 93-97. — Бібліогр.: 19 назв. — англ. 1560-8034 PACS: 07.79.-v, 07.10.Pz,) 7.10 Cm, 07.07.Df, 85.40.Qx, 84.37.+q http://dspace.nbuv.gov.ua/handle/123456789/117927 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
A purpose of the paper is to give a review of recent development (1998-1999) in microelectromechanical (MEMS) devices formed on silicon-on-insulator (SOI) substrates. Advantages of using SOI are summarised. Problems of CMOS-MEMS integration for smart sensors are listed. Examples of successful use of SOI to fabricate advanced MEMS are given and future prospects MEMS on SOI are evaluated. |
| format |
Article |
| author |
Usenko, A.Y. Carr, W.N. |
| spellingShingle |
Usenko, A.Y. Carr, W.N. Silicon-on-insulator technology for microelectromechanical applications Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Usenko, A.Y. Carr, W.N. |
| author_sort |
Usenko, A.Y. |
| title |
Silicon-on-insulator technology for microelectromechanical applications |
| title_short |
Silicon-on-insulator technology for microelectromechanical applications |
| title_full |
Silicon-on-insulator technology for microelectromechanical applications |
| title_fullStr |
Silicon-on-insulator technology for microelectromechanical applications |
| title_full_unstemmed |
Silicon-on-insulator technology for microelectromechanical applications |
| title_sort |
silicon-on-insulator technology for microelectromechanical applications |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
1999 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/117927 |
| citation_txt |
Silicon-on-insulator technology for microelectromechanical applications / A.Y. Usenko, W.N. Carr // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 1. — С. 93-97. — Бібліогр.: 19 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| work_keys_str_mv |
AT usenkoay silicononinsulatortechnologyformicroelectromechanicalapplications AT carrwn silicononinsulatortechnologyformicroelectromechanicalapplications |
| first_indexed |
2023-10-18T20:30:56Z |
| last_indexed |
2023-10-18T20:30:56Z |
| _version_ |
1796150402889023488 |