Testing the optical methods by using the multi-level holographic grating
In this work the interaction peculiarities of electro-magnetic optical range radiation with gratings’ surfaces are investigated. The multilevel diffractive holographic grating is proposed to be used for the polarization optical methods testing. This object allowed to obtain simultaneous visualiza...
Збережено в:
| Дата: | 2009 |
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| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2009
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| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/118614 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Testing the optical methods by using the multi-level holographic grating / О.I.Barchuk, Y.V.Braginets, O.S.Klimov, Y.A.Oberemok, S.N.Savenkov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 1. — С. 57-63. — Бібліогр.: 18 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
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dspace |
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irk-123456789-1186142017-05-31T03:08:19Z Testing the optical methods by using the multi-level holographic grating Barchuk, О.I. Braginets, Y.V. Klimov, O.S. Oberemok, Y.A. Savenkov, S.N. In this work the interaction peculiarities of electro-magnetic optical range radiation with gratings’ surfaces are investigated. The multilevel diffractive holographic grating is proposed to be used for the polarization optical methods testing. This object allowed to obtain simultaneous visualization of different spatial frequencies and to estimate both structure and surface peculiarities when working with 3D-objects. Using this additional information one can remove uncertainty in solution of the inverse problem of ellipsometry related with ellipsometric angles periodicity. Thereby, multiangle ellipsometry allowing investigation of the specular reflection component could be used to study submicron peculiarities of the object. We have also presented the basic aspects of ellipsometric method optimization. It was shown that anisotropy parameters, such as linear amplitude anisotropy and linear phase anisotropy, obtained from ellipsometric measurements are the most effective to ascertain the submicron characteristic dimension of material. 2009 Article Testing the optical methods by using the multi-level holographic grating / О.I.Barchuk, Y.V.Braginets, O.S.Klimov, Y.A.Oberemok, S.N.Savenkov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 1. — С. 57-63. — Бібліогр.: 18 назв. — англ. 1560-8034 PACS 81.16.Nd, 85.40.Hp http://dspace.nbuv.gov.ua/handle/123456789/118614 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
In this work the interaction peculiarities of electro-magnetic optical range
radiation with gratings’ surfaces are investigated. The multilevel diffractive holographic
grating is proposed to be used for the polarization optical methods testing. This object
allowed to obtain simultaneous visualization of different spatial frequencies and to
estimate both structure and surface peculiarities when working with 3D-objects. Using
this additional information one can remove uncertainty in solution of the inverse problem
of ellipsometry related with ellipsometric angles periodicity. Thereby, multiangle
ellipsometry allowing investigation of the specular reflection component could be used to
study submicron peculiarities of the object. We have also presented the basic aspects of
ellipsometric method optimization. It was shown that anisotropy parameters, such as
linear amplitude anisotropy and linear phase anisotropy, obtained from ellipsometric
measurements are the most effective to ascertain the submicron characteristic dimension
of material. |
| format |
Article |
| author |
Barchuk, О.I. Braginets, Y.V. Klimov, O.S. Oberemok, Y.A. Savenkov, S.N. |
| spellingShingle |
Barchuk, О.I. Braginets, Y.V. Klimov, O.S. Oberemok, Y.A. Savenkov, S.N. Testing the optical methods by using the multi-level holographic grating Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Barchuk, О.I. Braginets, Y.V. Klimov, O.S. Oberemok, Y.A. Savenkov, S.N. |
| author_sort |
Barchuk, О.I. |
| title |
Testing the optical methods by using the multi-level holographic grating |
| title_short |
Testing the optical methods by using the multi-level holographic grating |
| title_full |
Testing the optical methods by using the multi-level holographic grating |
| title_fullStr |
Testing the optical methods by using the multi-level holographic grating |
| title_full_unstemmed |
Testing the optical methods by using the multi-level holographic grating |
| title_sort |
testing the optical methods by using the multi-level holographic grating |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
2009 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/118614 |
| citation_txt |
Testing the optical methods by using the multi-level holographic grating / О.I.Barchuk, Y.V.Braginets, O.S.Klimov, Y.A.Oberemok, S.N.Savenkov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 1. — С. 57-63. — Бібліогр.: 18 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
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| first_indexed |
2023-10-18T20:32:37Z |
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2023-10-18T20:32:37Z |
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