Effect of surface condition on strain in semiconductor crystal sample

Using the optical-polarization technique with polarization modulation, we measured stresses due to surface tension in a single-crystalline silicon sample. Optical anisotropy distribution along the normal to the sample surface was studied at different state conditions, depending on its treatment. It...

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Бібліографічні деталі
Дата:2001
Автори: Serdega, B.K., Nikitenko, E.V., Prikhodenko, V.I.
Формат: Стаття
Мова:English
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2001
Назва видання:Semiconductor Physics Quantum Electronics & Optoelectronics
Онлайн доступ:http://dspace.nbuv.gov.ua/handle/123456789/119234
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Effect of surface condition on strain in semiconductor crystal sample / B.K. Serdega, E.V. Nikitenko, V.I. Prikhodenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2001. — Т. 4, № 1. — С. 9-11. — Бібліогр.: 6 назв. — англ.

Репозитарії

Digital Library of Periodicals of National Academy of Sciences of Ukraine
id irk-123456789-119234
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spelling irk-123456789-1192342017-06-06T03:04:08Z Effect of surface condition on strain in semiconductor crystal sample Serdega, B.K. Nikitenko, E.V. Prikhodenko, V.I. Using the optical-polarization technique with polarization modulation, we measured stresses due to surface tension in a single-crystalline silicon sample. Optical anisotropy distribution along the normal to the sample surface was studied at different state conditions, depending on its treatment. It was found that presence of a surface layer in the crystal, with physical properties differing from those in the bulk, gave rise to extended distribution of stresses in the uniform part of the crystal. 2001 Article Effect of surface condition on strain in semiconductor crystal sample / B.K. Serdega, E.V. Nikitenko, V.I. Prikhodenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2001. — Т. 4, № 1. — С. 9-11. — Бібліогр.: 6 назв. — англ. 1560-8034 PACS: 78.20.C http://dspace.nbuv.gov.ua/handle/123456789/119234 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
description Using the optical-polarization technique with polarization modulation, we measured stresses due to surface tension in a single-crystalline silicon sample. Optical anisotropy distribution along the normal to the sample surface was studied at different state conditions, depending on its treatment. It was found that presence of a surface layer in the crystal, with physical properties differing from those in the bulk, gave rise to extended distribution of stresses in the uniform part of the crystal.
format Article
author Serdega, B.K.
Nikitenko, E.V.
Prikhodenko, V.I.
spellingShingle Serdega, B.K.
Nikitenko, E.V.
Prikhodenko, V.I.
Effect of surface condition on strain in semiconductor crystal sample
Semiconductor Physics Quantum Electronics & Optoelectronics
author_facet Serdega, B.K.
Nikitenko, E.V.
Prikhodenko, V.I.
author_sort Serdega, B.K.
title Effect of surface condition on strain in semiconductor crystal sample
title_short Effect of surface condition on strain in semiconductor crystal sample
title_full Effect of surface condition on strain in semiconductor crystal sample
title_fullStr Effect of surface condition on strain in semiconductor crystal sample
title_full_unstemmed Effect of surface condition on strain in semiconductor crystal sample
title_sort effect of surface condition on strain in semiconductor crystal sample
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
publishDate 2001
url http://dspace.nbuv.gov.ua/handle/123456789/119234
citation_txt Effect of surface condition on strain in semiconductor crystal sample / B.K. Serdega, E.V. Nikitenko, V.I. Prikhodenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2001. — Т. 4, № 1. — С. 9-11. — Бібліогр.: 6 назв. — англ.
series Semiconductor Physics Quantum Electronics & Optoelectronics
work_keys_str_mv AT serdegabk effectofsurfaceconditiononstraininsemiconductorcrystalsample
AT nikitenkoev effectofsurfaceconditiononstraininsemiconductorcrystalsample
AT prikhodenkovi effectofsurfaceconditiononstraininsemiconductorcrystalsample
first_indexed 2023-10-18T20:34:05Z
last_indexed 2023-10-18T20:34:05Z
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