Optoelectronic sensor of longitudinal and angular displacements
In the sensor a triangulation method of displacement measurement has been used. A method of sensor calibration using interferometric distance measurements has been elaborated. Linearity and resolution investigations have been performed for different parameter sets of sensor transmitting-receiving he...
Збережено в:
| Дата: | 1999 |
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| Автори: | , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
1999
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| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/119869 |
| Теги: |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Optoelectronic sensor of longitudinal and angular displacements / A. Dlugaszek, J. Jabczynski, J. Janucki, W. Skrzeczanowski // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 3. — С. 71-73. — Бібліогр.: 5 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | In the sensor a triangulation method of displacement measurement has been used. A method of sensor calibration using interferometric distance measurements has been elaborated. Linearity and resolution investigations have been performed for different parameter sets of sensor transmitting-receiving head. An accuracy of displacement measurements depends on parameters of a beam illuminating a surface being displaced, parameters of a position sensitive detector and on a signal-to-noise ratio of a signal analog processing block. Results of investigations of uncertainties of lathe slide shifts are also presented. |
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