Strain effect in surface acoustic wave elements with a piezoelectric acoustic line and sensors based on this effect
The results of investigations of strain effect in surface acoustic wave (SAW) elements with a piezoelectric ceramic (PC) acoustic line are presented. The choice of PC material for acoustic line is substantiated. Some recommendations concerning formation of interdigital transducer structures of the S...
Збережено в:
| Дата: | 2000 |
|---|---|
| Автор: | |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2000
|
| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/120225 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Strain effect in surface acoustic wave elements with a piezoelectric acoustic line and sensors based on this effect / Ya.I. Lepikh // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 1. — С. 91-93. — Бібліогр.: 14 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-120225 |
|---|---|
| record_format |
dspace |
| spelling |
irk-123456789-1202252017-06-12T03:05:43Z Strain effect in surface acoustic wave elements with a piezoelectric acoustic line and sensors based on this effect Lepikh, Ya.I. The results of investigations of strain effect in surface acoustic wave (SAW) elements with a piezoelectric ceramic (PC) acoustic line are presented. The choice of PC material for acoustic line is substantiated. Some recommendations concerning formation of interdigital transducer structures of the SAW element with PC acoustic line are given. For acoustic lines of different thicknesses fixed in cantilever a dependence of sensor responsivity on deforming force load is found. At optimum thickness of the PC acoustic line the sensor responsivity of 70 Hz/N is realized. The results of this work are compared to those obtained for single-crystal acoustic lines by other authors. A design of a pressure sensor with a strain-sensitive SAW element is presented, and some advantages of such sensors are discussed. 2000 Article Strain effect in surface acoustic wave elements with a piezoelectric acoustic line and sensors based on this effect / Ya.I. Lepikh // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 1. — С. 91-93. — Бібліогр.: 14 назв. — англ. 1560-8034 PACS: 07.07. D, 77.84. L http://dspace.nbuv.gov.ua/handle/123456789/120225 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
The results of investigations of strain effect in surface acoustic wave (SAW) elements with a piezoelectric ceramic (PC) acoustic line are presented. The choice of PC material for acoustic line is substantiated. Some recommendations concerning formation of interdigital transducer structures of the SAW element with PC acoustic line are given. For acoustic lines of different thicknesses fixed in cantilever a dependence of sensor responsivity on deforming force load is found. At optimum thickness of the PC acoustic line the sensor responsivity of 70 Hz/N is realized. The results of this work are compared to those obtained for single-crystal acoustic lines by other authors. A design of a pressure sensor with a strain-sensitive SAW element is presented, and some advantages of such sensors are discussed. |
| format |
Article |
| author |
Lepikh, Ya.I. |
| spellingShingle |
Lepikh, Ya.I. Strain effect in surface acoustic wave elements with a piezoelectric acoustic line and sensors based on this effect Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Lepikh, Ya.I. |
| author_sort |
Lepikh, Ya.I. |
| title |
Strain effect in surface acoustic wave elements with a piezoelectric acoustic line and sensors based on this effect |
| title_short |
Strain effect in surface acoustic wave elements with a piezoelectric acoustic line and sensors based on this effect |
| title_full |
Strain effect in surface acoustic wave elements with a piezoelectric acoustic line and sensors based on this effect |
| title_fullStr |
Strain effect in surface acoustic wave elements with a piezoelectric acoustic line and sensors based on this effect |
| title_full_unstemmed |
Strain effect in surface acoustic wave elements with a piezoelectric acoustic line and sensors based on this effect |
| title_sort |
strain effect in surface acoustic wave elements with a piezoelectric acoustic line and sensors based on this effect |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
2000 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/120225 |
| citation_txt |
Strain effect in surface acoustic wave elements with a piezoelectric acoustic line and sensors based on this effect / Ya.I. Lepikh // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 1. — С. 91-93. — Бібліогр.: 14 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| work_keys_str_mv |
AT lepikhyai straineffectinsurfaceacousticwaveelementswithapiezoelectricacousticlineandsensorsbasedonthiseffect |
| first_indexed |
2023-10-18T20:36:42Z |
| last_indexed |
2023-10-18T20:36:42Z |
| _version_ |
1796150649441746944 |