Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification

The modification of the surface structure of the hybrid coating TiN/Al₂O₃ with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal det...

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Дата:2013
Автори: Pogrebnjak, A.D., Borisyuk, V.N., Bagdasaryan, A.A.
Формат: Стаття
Мова:English
Опубліковано: Інститут фізики конденсованих систем НАН України 2013
Назва видання:Condensed Matter Physics
Онлайн доступ:http://dspace.nbuv.gov.ua/handle/123456789/120821
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification / A.D. Pogrebnjak, V.N. Borisyuk, A.A. Bagdasaryan // Condensed Matter Physics. — 2013. — Т. 16, № 3. — С. 33803:1-8 . — Бібліогр.: 21 назв. — англ.

Репозитарії

Digital Library of Periodicals of National Academy of Sciences of Ukraine
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spelling irk-123456789-1208212017-06-14T03:03:22Z Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification Pogrebnjak, A.D. Borisyuk, V.N. Bagdasaryan, A.A. The modification of the surface structure of the hybrid coating TiN/Al₂O₃ with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal detrended fluctuation analysis (MF-DFA). The multifractal spectrum of the surface is calculated as a quantitative parameter of the roughness. It is shown that with the increase of the beam energy, the surface become more regular and uniform. Проаналiзовано процес модифiкацiї структури поверхнi гiбридного покриття TiN/Al₂O₃ пiд впливом низькоенергетичного сильнострумового електронного пучка. Шорсткiсть поверхнi розглянуто як функцiю струму пучка. Поверхнi отриманих зразкiв дослiджувались за допомогою двовимiрного мультифрактального флуктуацiйного аналiзу. Для кiлькiсного аналiзу змiни шорсткостi розрахована функцiя мультифрактального спектру. Показано, що зi збiльшенням енергiї пучка поверхня стає бiльш регулярною та рiвномiрною. 2013 Article Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification / A.D. Pogrebnjak, V.N. Borisyuk, A.A. Bagdasaryan // Condensed Matter Physics. — 2013. — Т. 16, № 3. — С. 33803:1-8 . — Бібліогр.: 21 назв. — англ. 1607-324X PACS: 81.40.- z, 81.07.- b, 68.35.-p, 61.46.-w, 05.45.Df, 61.43.Hv DOI:10.5488/CMP.16.33803 arXiv:1310.1235 http://dspace.nbuv.gov.ua/handle/123456789/120821 en Condensed Matter Physics Інститут фізики конденсованих систем НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
description The modification of the surface structure of the hybrid coating TiN/Al₂O₃ with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal detrended fluctuation analysis (MF-DFA). The multifractal spectrum of the surface is calculated as a quantitative parameter of the roughness. It is shown that with the increase of the beam energy, the surface become more regular and uniform.
format Article
author Pogrebnjak, A.D.
Borisyuk, V.N.
Bagdasaryan, A.A.
spellingShingle Pogrebnjak, A.D.
Borisyuk, V.N.
Bagdasaryan, A.A.
Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification
Condensed Matter Physics
author_facet Pogrebnjak, A.D.
Borisyuk, V.N.
Bagdasaryan, A.A.
author_sort Pogrebnjak, A.D.
title Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification
title_short Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification
title_full Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification
title_fullStr Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification
title_full_unstemmed Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification
title_sort numerical analysis of the morphological and phase changes in the tin/al₂o₃ coating under high current electron beam modification
publisher Інститут фізики конденсованих систем НАН України
publishDate 2013
url http://dspace.nbuv.gov.ua/handle/123456789/120821
citation_txt Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification / A.D. Pogrebnjak, V.N. Borisyuk, A.A. Bagdasaryan // Condensed Matter Physics. — 2013. — Т. 16, № 3. — С. 33803:1-8 . — Бібліогр.: 21 назв. — англ.
series Condensed Matter Physics
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first_indexed 2023-10-18T20:38:13Z
last_indexed 2023-10-18T20:38:13Z
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