Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification
The modification of the surface structure of the hybrid coating TiN/Al₂O₃ with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal det...
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Дата: | 2013 |
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Автори: | , , |
Формат: | Стаття |
Мова: | English |
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Інститут фізики конденсованих систем НАН України
2013
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Назва видання: | Condensed Matter Physics |
Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/120821 |
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Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Цитувати: | Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification / A.D. Pogrebnjak, V.N. Borisyuk, A.A. Bagdasaryan // Condensed Matter Physics. — 2013. — Т. 16, № 3. — С. 33803:1-8 . — Бібліогр.: 21 назв. — англ. |
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irk-123456789-1208212017-06-14T03:03:22Z Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification Pogrebnjak, A.D. Borisyuk, V.N. Bagdasaryan, A.A. The modification of the surface structure of the hybrid coating TiN/Al₂O₃ with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal detrended fluctuation analysis (MF-DFA). The multifractal spectrum of the surface is calculated as a quantitative parameter of the roughness. It is shown that with the increase of the beam energy, the surface become more regular and uniform. Проаналiзовано процес модифiкацiї структури поверхнi гiбридного покриття TiN/Al₂O₃ пiд впливом низькоенергетичного сильнострумового електронного пучка. Шорсткiсть поверхнi розглянуто як функцiю струму пучка. Поверхнi отриманих зразкiв дослiджувались за допомогою двовимiрного мультифрактального флуктуацiйного аналiзу. Для кiлькiсного аналiзу змiни шорсткостi розрахована функцiя мультифрактального спектру. Показано, що зi збiльшенням енергiї пучка поверхня стає бiльш регулярною та рiвномiрною. 2013 Article Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification / A.D. Pogrebnjak, V.N. Borisyuk, A.A. Bagdasaryan // Condensed Matter Physics. — 2013. — Т. 16, № 3. — С. 33803:1-8 . — Бібліогр.: 21 назв. — англ. 1607-324X PACS: 81.40.- z, 81.07.- b, 68.35.-p, 61.46.-w, 05.45.Df, 61.43.Hv DOI:10.5488/CMP.16.33803 arXiv:1310.1235 http://dspace.nbuv.gov.ua/handle/123456789/120821 en Condensed Matter Physics Інститут фізики конденсованих систем НАН України |
institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
collection |
DSpace DC |
language |
English |
description |
The modification of the surface structure of the hybrid coating TiN/Al₂O₃ with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal detrended fluctuation analysis (MF-DFA). The multifractal spectrum of the surface is calculated as a quantitative parameter of the roughness. It is shown that with the increase of the beam energy, the surface become more regular and uniform. |
format |
Article |
author |
Pogrebnjak, A.D. Borisyuk, V.N. Bagdasaryan, A.A. |
spellingShingle |
Pogrebnjak, A.D. Borisyuk, V.N. Bagdasaryan, A.A. Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification Condensed Matter Physics |
author_facet |
Pogrebnjak, A.D. Borisyuk, V.N. Bagdasaryan, A.A. |
author_sort |
Pogrebnjak, A.D. |
title |
Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification |
title_short |
Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification |
title_full |
Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification |
title_fullStr |
Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification |
title_full_unstemmed |
Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification |
title_sort |
numerical analysis of the morphological and phase changes in the tin/al₂o₃ coating under high current electron beam modification |
publisher |
Інститут фізики конденсованих систем НАН України |
publishDate |
2013 |
url |
http://dspace.nbuv.gov.ua/handle/123456789/120821 |
citation_txt |
Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification / A.D. Pogrebnjak, V.N. Borisyuk, A.A. Bagdasaryan // Condensed Matter Physics. — 2013. — Т. 16, № 3. — С. 33803:1-8 . — Бібліогр.: 21 назв. — англ. |
series |
Condensed Matter Physics |
work_keys_str_mv |
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first_indexed |
2023-10-18T20:38:13Z |
last_indexed |
2023-10-18T20:38:13Z |
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