Phase composition, structure and stress state of magnetron sputtered W-Ti condensates
The effects of elemental composition and deposition temperature on W—Ti ion-plasma condensate structure, substructure characteristics and stress state have been studied. The crystalline state of all phases formed during deposition has been found to be based on the α-W bcc crystalline lattice. In the...
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| Дата: | 2006 |
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| Автор: | |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
НТК «Інститут монокристалів» НАН України
2006
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| Назва видання: | Functional Materials |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/135072 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Phase composition, structure and stress state of magnetron sputtered W-Ti condensates / O.V. Sobol` // Functional Materials. — 2006. — Т. 13, № 4. — С. 577-583. — Бібліогр.: 17 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
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irk-123456789-1350722018-06-15T03:07:01Z Phase composition, structure and stress state of magnetron sputtered W-Ti condensates Sobol`, O.V. The effects of elemental composition and deposition temperature on W—Ti ion-plasma condensate structure, substructure characteristics and stress state have been studied. The crystalline state of all phases formed during deposition has been found to be based on the α-W bcc crystalline lattice. In the initial stages of solid solution formation under relatively low content of substituting titanium atoms in the lattice (7 to 11 at.%), oriented crystallite growth takes place with (100) planes parallel to the condensate surface. At higher titanium atomic content in the lattice, strongly strained crystallites of (W₁₋ₓ, Tiₓ) solid solution are formed with light preferential orientation of (110) plane parallel to the growth surface. In this case, the deposition temperature elevation from 300°C to 800°C results in concentration stratification of the formed solid solution followed by formation of two solid solutions with different stable elemental composition. The diffusion coefficient in nano-crystalline W—Ti condensates has been estimated and models describing the formed condensate structure state are proposed. 2006 Article Phase composition, structure and stress state of magnetron sputtered W-Ti condensates / O.V. Sobol` // Functional Materials. — 2006. — Т. 13, № 4. — С. 577-583. — Бібліогр.: 17 назв. — англ. 1027-5495 http://dspace.nbuv.gov.ua/handle/123456789/135072 en Functional Materials НТК «Інститут монокристалів» НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
The effects of elemental composition and deposition temperature on W—Ti ion-plasma condensate structure, substructure characteristics and stress state have been studied. The crystalline state of all phases formed during deposition has been found to be based on the α-W bcc crystalline lattice. In the initial stages of solid solution formation under relatively low content of substituting titanium atoms in the lattice (7 to 11 at.%), oriented crystallite growth takes place with (100) planes parallel to the condensate surface. At higher titanium atomic content in the lattice, strongly strained crystallites of (W₁₋ₓ, Tiₓ) solid solution are formed with light preferential orientation of (110) plane parallel to the growth surface. In this case, the deposition temperature elevation from 300°C to 800°C results in concentration stratification of the formed solid solution followed by formation of two solid solutions with different stable elemental composition. The diffusion coefficient in nano-crystalline W—Ti condensates has been estimated and models describing the formed condensate structure state are proposed. |
| format |
Article |
| author |
Sobol`, O.V. |
| spellingShingle |
Sobol`, O.V. Phase composition, structure and stress state of magnetron sputtered W-Ti condensates Functional Materials |
| author_facet |
Sobol`, O.V. |
| author_sort |
Sobol`, O.V. |
| title |
Phase composition, structure and stress state of magnetron sputtered W-Ti condensates |
| title_short |
Phase composition, structure and stress state of magnetron sputtered W-Ti condensates |
| title_full |
Phase composition, structure and stress state of magnetron sputtered W-Ti condensates |
| title_fullStr |
Phase composition, structure and stress state of magnetron sputtered W-Ti condensates |
| title_full_unstemmed |
Phase composition, structure and stress state of magnetron sputtered W-Ti condensates |
| title_sort |
phase composition, structure and stress state of magnetron sputtered w-ti condensates |
| publisher |
НТК «Інститут монокристалів» НАН України |
| publishDate |
2006 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/135072 |
| citation_txt |
Phase composition, structure and stress state of magnetron sputtered W-Ti condensates / O.V. Sobol` // Functional Materials. — 2006. — Т. 13, № 4. — С. 577-583. — Бібліогр.: 17 назв. — англ. |
| series |
Functional Materials |
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AT sobolov phasecompositionstructureandstressstateofmagnetronsputteredwticondensates |
| first_indexed |
2023-10-18T21:09:26Z |
| last_indexed |
2023-10-18T21:09:26Z |
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1796152067251765248 |