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Vacuum arc plasma source with rectilinear filter for deposition of functional coatings

Design and operation principle of a novel vacuum-arc source of filtered erosive plasma are described. The macroparticles are removed from the plasma by transformation of radial plasma streams emitted by the cathode spot of the arc on the side surface of cylindrical cathode, into axial stream by mean...

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Bibliographic Details
Main Authors: Aksenov, I.I., Aksyonov, D.S.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2008
Series:Functional Materials
Subjects:
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/135355
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