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Mechanism of AlN film formation at thermochemical nitridization of sapphire
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Format: | Article |
Language: | English |
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НТК «Інститут монокристалів» НАН України
2011
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Series: | Functional Materials |
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Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/135411 |
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irk-123456789-1354112018-06-16T03:04:17Z Mechanism of AlN film formation at thermochemical nitridization of sapphire Kaltaev, Kh.Sh.-ogly Nizhankovskiy, S.V. Sidelnikova, N.S. Rom, M.A. Dan'ko, A.Ya. Dobrotvorskaya, M.V. Belyaev, A.Ye. Strelchuk, V.V. Kolomys, A.F. Characterization and properties 2011 Article Mechanism of AlN film formation at thermochemical nitridization of sapphire / Kh.Sh.-ogly Kaltaev, S.V. Nizhankovskiy, N.S. Sidelnikova, M.A. Rom, A.Ya. Dan'ko, M.V. Dobrotvorskaya, A.Ye. Belyaev, V.V. Strelchuk, A.F. Kolomys // Functional Materials. — 2011. — Т. 18, № 1. — С. 41-49. — Бібліогр.: 27 назв. — англ. 1027-5495 http://dspace.nbuv.gov.ua/handle/123456789/135411 en Functional Materials НТК «Інститут монокристалів» НАН України |
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Characterization and properties Characterization and properties |
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Characterization and properties Characterization and properties Kaltaev, Kh.Sh.-ogly Nizhankovskiy, S.V. Sidelnikova, N.S. Rom, M.A. Dan'ko, A.Ya. Dobrotvorskaya, M.V. Belyaev, A.Ye. Strelchuk, V.V. Kolomys, A.F. Mechanism of AlN film formation at thermochemical nitridization of sapphire Functional Materials |
format |
Article |
author |
Kaltaev, Kh.Sh.-ogly Nizhankovskiy, S.V. Sidelnikova, N.S. Rom, M.A. Dan'ko, A.Ya. Dobrotvorskaya, M.V. Belyaev, A.Ye. Strelchuk, V.V. Kolomys, A.F. |
author_facet |
Kaltaev, Kh.Sh.-ogly Nizhankovskiy, S.V. Sidelnikova, N.S. Rom, M.A. Dan'ko, A.Ya. Dobrotvorskaya, M.V. Belyaev, A.Ye. Strelchuk, V.V. Kolomys, A.F. |
author_sort |
Kaltaev, Kh.Sh.-ogly |
title |
Mechanism of AlN film formation at thermochemical nitridization of sapphire |
title_short |
Mechanism of AlN film formation at thermochemical nitridization of sapphire |
title_full |
Mechanism of AlN film formation at thermochemical nitridization of sapphire |
title_fullStr |
Mechanism of AlN film formation at thermochemical nitridization of sapphire |
title_full_unstemmed |
Mechanism of AlN film formation at thermochemical nitridization of sapphire |
title_sort |
mechanism of aln film formation at thermochemical nitridization of sapphire |
publisher |
НТК «Інститут монокристалів» НАН України |
publishDate |
2011 |
topic_facet |
Characterization and properties |
url |
http://dspace.nbuv.gov.ua/handle/123456789/135411 |
citation_txt |
Mechanism of AlN film formation at thermochemical nitridization of sapphire / Kh.Sh.-ogly Kaltaev, S.V. Nizhankovskiy, N.S. Sidelnikova, M.A. Rom, A.Ya. Dan'ko, M.V. Dobrotvorskaya, A.Ye. Belyaev, V.V. Strelchuk, A.F. Kolomys // Functional Materials. — 2011. — Т. 18, № 1. — С. 41-49. — Бібліогр.: 27 назв. — англ. |
series |
Functional Materials |
work_keys_str_mv |
AT kaltaevkhshogly mechanismofalnfilmformationatthermochemicalnitridizationofsapphire AT nizhankovskiysv mechanismofalnfilmformationatthermochemicalnitridizationofsapphire AT sidelnikovans mechanismofalnfilmformationatthermochemicalnitridizationofsapphire AT romma mechanismofalnfilmformationatthermochemicalnitridizationofsapphire AT dankoaya mechanismofalnfilmformationatthermochemicalnitridizationofsapphire AT dobrotvorskayamv mechanismofalnfilmformationatthermochemicalnitridizationofsapphire AT belyaevaye mechanismofalnfilmformationatthermochemicalnitridizationofsapphire AT strelchukvv mechanismofalnfilmformationatthermochemicalnitridizationofsapphire AT kolomysaf mechanismofalnfilmformationatthermochemicalnitridizationofsapphire |
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2023-10-18T21:10:09Z |
last_indexed |
2023-10-18T21:10:09Z |
_version_ |
1796152099296247808 |