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Mechanism of AlN film formation at thermochemical nitridization of sapphire

Mechanism of AlN film formation at thermochemical nitridization of sapphire

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Bibliographic Details
Main Authors: Kaltaev, Kh.Sh.-ogly, Nizhankovskiy, S.V., Sidelnikova, N.S., Rom, M.A., Dan'ko, A.Ya., Dobrotvorskaya, M.V., Belyaev, A.Ye., Strelchuk, V.V., Kolomys, A.F.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2011
Series:Functional Materials
Subjects:
Characterization and properties
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/135411
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http://dspace.nbuv.gov.ua/handle/123456789/135411

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