Structural and optical characteristics of disordered silicon carbide films

Using spectrophotometry and electron microscopy, the properties of disordered SiC films have been studied. A nontrivial character of spectral absorption has been revealed depending on the structural and polytype constitution of the films. SiC polytypes forming the film and the band gap widths have b...

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Date:2008
Main Author: Lopin, A.V.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2008
Series:Functional Materials
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Online Access:http://dspace.nbuv.gov.ua/handle/123456789/135608
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Structural and optical characteristics of disordered silicon carbide films // A.V. Lopin // Functional Materials. — 2008. — Т. 15, № 4. — С. 492-495. — Бібліогр.: 6 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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spelling irk-123456789-1356082018-06-16T03:08:13Z Structural and optical characteristics of disordered silicon carbide films Lopin, A.V. Characterization and properties Using spectrophotometry and electron microscopy, the properties of disordered SiC films have been studied. A nontrivial character of spectral absorption has been revealed depending on the structural and polytype constitution of the films. SiC polytypes forming the film and the band gap widths have been determined. It has been shown that in this case, it is possible to obtain the information on the optical band-to-band transition modification depending on the film structure property and phase composition as well as on the influence of various phases and SiC film crystallinity extent on the band gap width. 3 використанням методів спектрофотометрії і електронної мікроскопії досліджено властивості невпорядкованих плівок карбіду кремнію. Виявлено нетривіальний характер спектра поглинання, залежний від структури і політипного складу плівок. Визначено політипи карбіду кремнію, що входять до складу плівки, і значення оптичної ширини забороненої зони. Показано, що при цьому можна отримати інформацію про видозміну оптичних міжзонних переходів залежно від зміни структури і фазового складу плівок, про впливи різних фаз та міри кристалічності плівок SiC на ширину забороненої зони. С использованием методов спектрофотометрии и электронной микроскопии изучены свойства неупорядоченных плёнок карбида кремния. Обнаружен нетривиальный характер спектра поглощения, зависящий от структуры и политипного состава плёнок. Определены политипы карбида кремния, входящего в состав плёнки и величины оптической ширины запрещённой зоны. Показано, что при этом можно получить информацию о видоизменении оптических межзонных переходов в зависимости от изменения структуры и фазового состава плёнок и о влиянии различных фаз и степени кристалличности плёнок SiC на ширину запрещённой зоны. 2008 Article Structural and optical characteristics of disordered silicon carbide films // A.V. Lopin // Functional Materials. — 2008. — Т. 15, № 4. — С. 492-495. — Бібліогр.: 6 назв. — англ. 1027-5495 http://dspace.nbuv.gov.ua/handle/123456789/135608 en Functional Materials НТК «Інститут монокристалів» НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
topic Characterization and properties
Characterization and properties
spellingShingle Characterization and properties
Characterization and properties
Lopin, A.V.
Structural and optical characteristics of disordered silicon carbide films
Functional Materials
description Using spectrophotometry and electron microscopy, the properties of disordered SiC films have been studied. A nontrivial character of spectral absorption has been revealed depending on the structural and polytype constitution of the films. SiC polytypes forming the film and the band gap widths have been determined. It has been shown that in this case, it is possible to obtain the information on the optical band-to-band transition modification depending on the film structure property and phase composition as well as on the influence of various phases and SiC film crystallinity extent on the band gap width.
format Article
author Lopin, A.V.
author_facet Lopin, A.V.
author_sort Lopin, A.V.
title Structural and optical characteristics of disordered silicon carbide films
title_short Structural and optical characteristics of disordered silicon carbide films
title_full Structural and optical characteristics of disordered silicon carbide films
title_fullStr Structural and optical characteristics of disordered silicon carbide films
title_full_unstemmed Structural and optical characteristics of disordered silicon carbide films
title_sort structural and optical characteristics of disordered silicon carbide films
publisher НТК «Інститут монокристалів» НАН України
publishDate 2008
topic_facet Characterization and properties
url http://dspace.nbuv.gov.ua/handle/123456789/135608
citation_txt Structural and optical characteristics of disordered silicon carbide films // A.V. Lopin // Functional Materials. — 2008. — Т. 15, № 4. — С. 492-495. — Бібліогр.: 6 назв. — англ.
series Functional Materials
work_keys_str_mv AT lopinav structuralandopticalcharacteristicsofdisorderedsiliconcarbidefilms
first_indexed 2025-07-09T23:41:58Z
last_indexed 2025-07-09T23:41:58Z
_version_ 1837214750229921792
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