Plasma activated eb-deposition: different modes of arc discharge and plasma characteristics

• Дата: 2017
• Автор: Safonov, V.
• Формат: Стаття
• Мова: English
• Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2017
• Назва видання: Вопросы атомной науки и техники
• Теми: Физика радиационных и ионно-плазменных технологий
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/136155
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Plasma activated eb-deposition: different modes of arc discharge and plasma characteristics / V. Safonov // Вопросы атомной науки и техники. — 2017. — № 5. — С. 65-72. — Бібліогр.: 25 назв. — англ.

The results of experimental study of the operating parameters of a non-self-sustaining arc discharge in the process of electron-beam evaporation of a cathode are presented in the paper. The conditions of ignition and burning of the arc discharge were studied. The plasma parameters, ion current on the substrate, and current-voltage characteristic of the discharge in Cr and Ti vapors are investigated depending on the electron beam power. It was shown that thermionic emission mechanism is not capable for providing of charge transfer on the cathode surface. The different arc modes are realized in the process of cathode heating by a focused electron beam. The arc can be permanently stable in two modes depending on the power of the electron beam. The regime of diffuse binding of the cathode spot is realized at beam power of more than 2.5 kW. At a lower power regime, a contracted spot is existed in the region of cathode heating by electron beam.