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The emission surface calculation for reactive gas ion source with decreased neutral gas inleakage
The possibility of calculating the cathode shape of an ion sources for a beam formation system is investigated with the computer code. The acceleration of nitrogen ions with energies from 10 to 50 keV and ion currents of 10…20 mA was investigated [1]. The charged particle beams dynamic in a two-pote...
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2017
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/136177 |
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