Magnetron sputtered coatings of AlN-TiCrB₂ system

• Дата: 2009
• Автори: Panasyuk, A.D., Podchernyaeva, I.A., Neshpor, I.P., Gawalek, W., Ivanov, V.N.
• Формат: Стаття
• Мова: English
• Опубліковано: НТК «Інститут монокристалів» НАН України 2009
• Назва видання: Functional Materials
• Теми: Technology
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/138944
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Magnetron sputtered coatings of AlN-TiCrB₂ system // A.D. Panasyuk, I.A. Podchernyaeva, I.P. Neshpor, W. Gawalek, V.N. Ivanov // Functional Materials. — 2009. — Т. 16, № 4. — С. 492-497. — Бібліогр.: 8 назв. — англ.

Wear and corrosion resistant coatings have been obtained by HF magnetron sputtering of an AlN-TiCrB₂ target (prepared by powder metallurgy technique) on Si, Al₂O₃ and GaAs single crystals. The coatings are characterized by ultra dispersed structure and a considerable high-temperature oxidation resistance caused by the formation of solid solutions in the Al₂O₃-TiO₂-Cr₂O₃ and Al₂O₃-B₂O₃ systems. The target material mass gain at 1300°C is 1.4 mg/cm². After the high-temperature oxidation, a reinforced disperse structure is formed in the coating as tangled Al₂O₃ fibers. The (AlN-TiCrB₂)-Al₂O₃ and (AlN-TiCrB₂)-GaAs coatings are thermally stable up to 900°C and show high microhardness (Hμ = 30 GPa) and fracture strength (K₁c = 3.3-4.7 MN/m³/²). As the annealing temperature rises (T > 1000°C), the coating mechanical properties deteriorate but its adhesion strength becomes improved. The target material AlN-TiCrB2 can be recommended to prepare wear and corrosion resistant coating on tools as well as on vital parts being operated in extreme conditions.