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2025-02-23T11:01:49-05:00 DEBUG: Deserialized SOLR response

Manufacturing technology, optical and spectral properties of nano-structurized thin ZnO films

Dependence of cathodoluminescence parameters on the annealing temperature and RF ion etching has been studied for nano-structurized thin zinc oxide films obtained by RF magnetron reactive sputtering. The film structure has been characterized by X-ray diffraction. Thermal annealing and RF ion etch...

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Bibliographic Details
Main Authors: Panasyuk, M.R., Turko, B.I., Kapustianik, V.B., Lubochkova, G.A., Rudyk, V.P., Vas`kiv, A.P., Davydov, V.M.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2005
Series:Functional Materials
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/139319
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