Using of proton beam writing techniques for fabrication of micro difraction gratings
To obtain micrometric gratings with a high aspect ratio by lithographic technique, it is proposed to use a proton beam focused in a line and electromagnetic scanning in the transverse direction to irradiate the resistive material. Numerical modeling is carried out to optimize the parameters of the...
Збережено в:
| Дата: | 2018 |
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| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2018
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| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/147662 |
| Теги: |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Using of proton beam writing techniques for fabrication of micro difraction gratings / A.G. Ponomarev, S.V. Kolinko, V.A. Rebrov, V.N. Kolomiets, S.N. Kravchenko // Вопросы атомной науки и техники. — 2018. — № 4. — С. 285-288. — Бібліогр.: 13 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | To obtain micrometric gratings with a high aspect ratio by lithographic technique, it is proposed to use a proton
beam focused in a line and electromagnetic scanning in the transverse direction to irradiate the resistive material.
Numerical modeling is carried out to optimize the parameters of the probe forming system for this task. The calculations were confirmed during the experimental implementation of the proposed technique. A grating from the
23.4×2060 μm lines was made. |
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