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The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy

The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy

Four stainless steel mirror specimens were sputtered to an identical mean thickness of the eroded layer 2 μm with Ar⁺ ions. Each specimen was exposed to ions with one kinetic energy from the followings: 300, 600, 1000, and 1350 eV. With the methods of microscopy and profilometry of microrelief th...

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Bibliographic Details
Main Authors: Bondarenko, V.N., Konovalov, V.G., Solodovchenko, S.I., Shtan′, A.F., Ryzhkov, I.V., Voitsenya, V.S., Lytvyn, P.M., Byrka, O.V., Skorik, O.A.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
Series:Вопросы атомной науки и техники
Subjects:
Динамика плазмы и взаимодействие плазма-стенка
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/148855
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Summary:Four stainless steel mirror specimens were sputtered to an identical mean thickness of the eroded layer 2 μm with Ar⁺ ions. Each specimen was exposed to ions with one kinetic energy from the followings: 300, 600, 1000, and 1350 eV. With the methods of microscopy and profilometry of microrelief the positive correlation was shown between the r. m. s. roughness, the power spectral density of the Fourier spectrum of the longitudinal wavelengths, on one hand, and the energy of ions, on the other hand.

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