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The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy
Four stainless steel mirror specimens were sputtered to an identical mean thickness of the eroded layer 2 μm with Ar⁺ ions. Each specimen was exposed to ions with one kinetic energy from the followings: 300, 600, 1000, and 1350 eV. With the methods of microscopy and profilometry of microrelief th...
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Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2018
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Series: | Вопросы атомной науки и техники |
Subjects: | |
Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/148855 |
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