Peculiarities of the oxide plasma creation using carbonate compounds

• Дата: 2018
• Автори: Shariy, S.V., Yuferov, V.B., Shvets, M.O., Korotkova, I.M., Shapoval, A.M., Tkachov, V.I.
• Формат: Стаття
• Мова: English
• Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
• Назва видання: Вопросы атомной науки и техники
• Теми: Низкотемпературная плазма и плазменные технологии
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/149069
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Peculiarities of the oxide plasma creation using carbonate compounds / S.V. Shariy, V.B. Yuferov, M.O. Shvets, I.M. Korotkova, A.M. Shapoval, V.I. Tkachov // Вопросы атомной науки и техники. — 2018. — № 6. — С. 293-296. — Бібліогр.: 8 назв. — англ.

The process of obtaining oxide plasma from carbonate compounds of calcium CaCO₃ and neodymium Nd₂(CO₃)₃ was studied. The experiment was carried out on a two-stage plasma source with a reflective discharge. The experiment was conducted with the following parameters: a discharge voltage of 50…150 V, a current of 8…30 A, a magnetic field of 100…200 Oe, the pressure in the vacuum chamber is 3·10⁻³…3·10⁻⁴ Torr. The ratio of the ionization potentials φi and the dissociation energy ε of the oxide components in the plasma was taken into account when selecting materials and analyzing the experimental data. For various conditions of the plasma arc burning, an analysis was made for the composition of the plasma and the elemental composition of the deposited target surfaces based on the experimental data.