Generator of low pressure volume plasma with plasma electron source

• Дата: 2018
• Автори: Khomich, V.A., Ryabtsev, A.V., Nazarenko, V.G.
• Формат: Стаття
• Мова: English
• Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
• Назва видання: Вопросы атомной науки и техники
• Теми: Низкотемпературная плазма и плазменные технологии
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/149073
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Generator of low pressure volume plasma with plasma electron source / V.A. Khomich, A.V. Ryabtsev, V.G. Nazarenko // Вопросы атомной науки и техники. — 2018. — № 6. — С. 308-311. — Бібліогр.: 11 назв. — англ.

In the current paper the results of a study of a volumetric high-current low-pressure discharge with a plasma electron source are presented. The source was made on the basis of a hollow cathode with a gas-magnetron ignition of the discharge and an auxiliary arc discharge for the cathode heating up to thermionic emission temperature. The gas-discharge plasma was generated at a working gas pressure 0.1...1 Pa and hade an electron concentration of 10¹⁰ ...(5×10¹¹) cm⁻³ in a volume of 0.1 m³. Also the volt-ampere characteristics, the ion current density distribution in the working volume are presented for different discharge conditions. The plasma generator may be used in the processes of ion-plasma technologies (oxidation, nitration in non-hydrogen media), as well as in energy-saving technologies of combined ion-plasma processing of structural materials. An improved electron plasma source with a hollow cathode will allow one to work in a wide range of discharge currents and also will be served for a large operating life of devices.