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Kinetics of Ar2+, Ar2* and Ar* in volume barrier discharge in argon
By means of computer simulation it is shown that Ar2+, Ar2* and Ar* species possess maximum concentration in volume barrier discharge in argon. Dependencies of concentrations of these species on the discharge parameters are obtained. Dependencies of characteristics of Ar2+ ion flows from the dischar...
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| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2010
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| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/17336 |
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