Structure of Fe-Cu coatings prepared by the magnetron sputtering method
This work presents the results of our research concerning the synthesis of metallic Fe-Cu coatings by use of the magnetron sputtering method. The structure of the coatings synthesized during two modes of pulsed magnetron sputtering was compared . In our experiment the pulsed magnetron power supply g...
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| Дата: | 2010 |
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| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | English |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2010
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| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/17490 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Structure of Fe-Cu coatings prepared by the magnetron sputtering method / K. Nowakowska-Langier, K. Zdunek, R. Chodun, R. Nietubyc, R. Mirowski, J. Witkowski // Вопросы атомной науки и техники. — 2010. — № 6. — С. 159-161. — Бібліогр.: 7 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-17490 |
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dspace |
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irk-123456789-174902011-02-27T12:07:14Z Structure of Fe-Cu coatings prepared by the magnetron sputtering method Nowakowska-Langier, K. Zdunek, K. Chodun, R. Nietubyc, R. Mirowski, R. Witkowski, J. Низкотемпературная плазма и плазменные технологии This work presents the results of our research concerning the synthesis of metallic Fe-Cu coatings by use of the magnetron sputtering method. The structure of the coatings synthesized during two modes of pulsed magnetron sputtering was compared . In our experiment the pulsed magnetron power supply generated a series of pulses gated at 1kHz - standard pulsed mode (SPM) and 2 Hz - low frequency pulsed mode (LFPM). The analysis of the microstructure by means of SEM and TEM show that obtained coatings are characterized by nanocrystalline structure. Additionally the optical emission spectra (OES) during the copper and iron sputtering were measured. 2010 Article Structure of Fe-Cu coatings prepared by the magnetron sputtering method / K. Nowakowska-Langier, K. Zdunek, R. Chodun, R. Nietubyc, R. Mirowski, J. Witkowski // Вопросы атомной науки и техники. — 2010. — № 6. — С. 159-161. — Бібліогр.: 7 назв. — англ. 1562-6016 http://dspace.nbuv.gov.ua/handle/123456789/17490 en Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| topic |
Низкотемпературная плазма и плазменные технологии Низкотемпературная плазма и плазменные технологии |
| spellingShingle |
Низкотемпературная плазма и плазменные технологии Низкотемпературная плазма и плазменные технологии Nowakowska-Langier, K. Zdunek, K. Chodun, R. Nietubyc, R. Mirowski, R. Witkowski, J. Structure of Fe-Cu coatings prepared by the magnetron sputtering method |
| description |
This work presents the results of our research concerning the synthesis of metallic Fe-Cu coatings by use of the magnetron sputtering method. The structure of the coatings synthesized during two modes of pulsed magnetron sputtering was compared . In our experiment the pulsed magnetron power supply generated a series of pulses gated at 1kHz - standard pulsed mode (SPM) and 2 Hz - low frequency pulsed mode (LFPM). The analysis of the microstructure by means of SEM and TEM show that obtained coatings are characterized by nanocrystalline structure. Additionally the optical emission spectra (OES) during the copper and iron sputtering were measured. |
| format |
Article |
| author |
Nowakowska-Langier, K. Zdunek, K. Chodun, R. Nietubyc, R. Mirowski, R. Witkowski, J. |
| author_facet |
Nowakowska-Langier, K. Zdunek, K. Chodun, R. Nietubyc, R. Mirowski, R. Witkowski, J. |
| author_sort |
Nowakowska-Langier, K. |
| title |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method |
| title_short |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method |
| title_full |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method |
| title_fullStr |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method |
| title_full_unstemmed |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method |
| title_sort |
structure of fe-cu coatings prepared by the magnetron sputtering method |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| publishDate |
2010 |
| topic_facet |
Низкотемпературная плазма и плазменные технологии |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/17490 |
| citation_txt |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method / K. Nowakowska-Langier, K. Zdunek, R. Chodun, R. Nietubyc, R. Mirowski, J. Witkowski // Вопросы атомной науки и техники. — 2010. — № 6. — С. 159-161. — Бібліогр.: 7 назв. — англ. |
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2023-10-18T17:00:10Z |
| last_indexed |
2023-10-18T17:00:10Z |
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