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The effect of unintentional oxygen incorporation into Cr-CrN-DLC coatings deposited by MePIIID method using filtered cathodic vacuum arc carbon and metal plasma
The multilayer Cr-CrN-DLC coatings deposited by MePIIID method on substrates made of high speed steel HS 6-5-2 were studied. The streams of filtered carbon and metal arc plasma were used in both ion implantation and deposition phases. Investigation of the chemical composition of Cr-CrN-DLC coatings...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2010
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| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/17497 |
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| Summary: | The multilayer Cr-CrN-DLC coatings deposited by MePIIID method on substrates made of high speed steel HS 6-5-2 were studied. The streams of filtered carbon and metal arc plasma were used in both ion implantation and deposition phases. Investigation of the chemical composition of Cr-CrN-DLC coatings revealed considerable amount of oxygen in deposited DLC film. Additional alloying of DLC films with chromium reduced the concentration of oxygen. The presence of oxygen affects the properties of DLC coatings, which was confirmed by the investigation of the hardness and adhesion. |
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