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Evolution of a dislocation structure during the growth silicon single crystals of n– and p–type

The kinetics of the formation of perfect n– and p–type silicon single crystals is considered. The peculiarity of the formation of point and linear defects in the process of a controlled phase transformation of a liquid–solid is established. The effect of supersaturation by vacancies of the direction...

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Bibliographic Details
Main Authors: Azarenkov, N.A., Semenenko, V.E., Stervoyedov, N.G.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2020
Series:Вопросы атомной науки и техники
Subjects:
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/194344
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