Using of electron cyclotron resonance discharge in ion beam sputtering systems for space charge compensation
The possibility of using a magnetic mirror in the output gap of ion source with a closed electron drift to generating of an additional gas discharge by using the electron-cyclotron resonance to compensate of the ion beam space charge is studied. The first experiments have shown that an additional mi...
Збережено в:
| Дата: | 2019 |
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| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2019
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| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/194631 |
| Теги: |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Using of electron cyclotron resonance discharge in ion beam sputtering systems for space charge compensation / A.A. Bizyukov, I.K. Tarasov, A.D. Chibisov // Problems of atomic science and technology. — 2019. — № 1. — С. 124-126. — Бібліогр.: 4 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | The possibility of using a magnetic mirror in the output gap of ion source with a closed electron drift to generating of an additional gas discharge by using the electron-cyclotron resonance to compensate of the ion beam space charge is studied. The first experiments have shown that an additional microwave discharge generated in the region of the annular gap when the microwave power is applied. An additional plasma source of electrons provides the maintenance and intensification of the gas discharge in the accelerator with an anode layer. |
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