Investigation of the influence of Ar pressure on vacuum-arc plasma with Cr-, Cu-, and Zr-cathodes
The work deals with the influence of argon pressure on the ion current of vacuum-arc discharge in the “Bulat-6” setup with Cr-Cu-Zr-cathodes, and also, on the rate of coating deposition on the surfaces being perpendicular and parallel to the plasma stream. It is shown that a substantial decrease in...
Збережено в:
| Дата: | 2019 |
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| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2019
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| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/194705 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Investigation of the influence of Ar pressure on vacuum-arc plasma with Cr-, Cu-, and Zr-cathodes / Yu.V. Kovtun, A.S. Kuprin, V.M. Lunev // Problems of atomic science and technology. — 2019. — № 1. — С. 145-148. — Бібліогр.: 25 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | The work deals with the influence of argon pressure on the ion current of vacuum-arc discharge in the “Bulat-6” setup with Cr-Cu-Zr-cathodes, and also, on the rate of coating deposition on the surfaces being perpendicular and parallel to the plasma stream. It is shown that a substantial decrease in both the ion current density and the rate of coating deposition takes place at Ar pressure above 1 Pa. Consideration is given to the elementary processes occurring during plasma stream-gas target interaction. |
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