Investigation of the abrasive durability of the multilayer diamond-like coatings for the ring-shaped dry gaseous seals made of SiC

• Дата: 2019
• Автори: Vasyliev, V.V., Luchaninov, A.A., Strel’nitskij, V.E.
• Формат: Стаття
• Мова: English
• Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
• Назва видання: Вопросы атомной науки и техники
• Теми: Low temperature plasma and plasma technologies
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/194834
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Investigation of the abrasive durability of the multilayer diamond-like coatings for the ring-shaped dry gaseous seals made of SiC / V.V. Vasyliev, A.A. Luchaninov, V.E. Strel’nitskij // Problems of atomic science and technology. — 2019. — № 1. — С. 216-218. — Бібліогр.: 5 назв. — англ.

The abrasion resistance of multi-layer vacuum-arc diamond-like (DLC) coatings of various architectures: quasigradient, as well as coatings with alternating hard and soft layers, whose structure and mechanical characteristics are specified by the amplitude of the bias potential and the deposition time of each layer are investigated. Increasing the thickness of the DLC to 6…7 μm by using a multilayer architecture with alternating soft and hard layers allows to improve the abrasion resistance of the protective coating, however, the adhesion of such coatings on silicon carbide is somewhat lower than that of the quasigradient ones. The parameters of the process of synthesis of DLCs, provid-ing a significant improvement in the mechanical characteristics of multilayer coatings, in comparison with the sin-gle-layer ones, are established.