Method for measuring external and internal parameters of plasma with ungrounded gas discharge electrodes

• Main Authors: Chunadra, А.G., Sereda, К.N., Tarasov, I.K.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
• Series: Вопросы атомной науки и техники
• Subjects: Low temperature plasma and plasma technologies
• Online Access: http://dspace.nbuv.gov.ua/handle/123456789/194835

This work is devoted to the method of measuring the external and internal parameters of gas-discharge plasma in conditions of non-potential "ground" using a multi-grid probe with ungrounded electrodes and a casing. The technique was developed in the plasma of a pulsed high-current high-voltage magnetron discharge with the electrodes detached from the ground. This technique makes it possible to measure ion and electron densities and plasma temperatures and potentials, as well as the ion and electron energy distribution functions, with the usual accuracy for probe measurements. The measurements were carried out by a three-electrode probe installed in the cathode sputtering zone. Selection of the investigated particles was carried out through a screen located under a floating potential.