Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel

• Дата: 2019
• Автори: Taran, A.V., Garkusha, I.E., Taran, V.S., Muratov, R.M., Skoblo, T.S., Romaniuk, S.P., Starikov, V.V., Baturin, A.A.
• Формат: Стаття
• Мова: English
• Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
• Назва видання: Вопросы атомной науки и техники
• Теми: Plasma diagnostics
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/194902
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel / A.V. Taran, I.E. Garkusha, V.S. Taran, R.M. Muratov, T.S. Skoblo, S.P. Romaniuk, V.V. Starikov, A.A. Baturin // Problems of atomic science and technology. — 2019. — № 1. — С. 243-247. — Бібліогр.: 18 назв. — англ.

The nanocrystalline films of zirconium nitride have been synthesized using ion-plasma vacuum-arc deposition technique in combination with high-frequency discharge (RF) on AISI 430 stainless steel at 150 °C. Structure examinations X-ray fluorescent analysis (XRF), X-ray diffraction analysis (XRD), scanning electron microscopy (SEM) with microanalysis (EDS), and transmission electron microscopy (TEM), nanoidentation method – were performed to study phase and chemical composition, surface morphology, microstructure and nanohardness of coatings. The developed technology provided low-temperature coatings synthesis, minimized discharge breakdown decreasing formation of macroparticles (MPs) and allowed to deposit ZrN coatings with hardness variation 26.6…31.5 GPa. It was revealed that ZrN single-phase coatings of cubic modification with finecrystalline grains of 20 nm in size were formed.