Growth rate of diamond-like coatings synthesized in RF discharge at various ratios of the concentrations of Ar and C₆H₆
Diamond-like coatings (DLC) synthesized by plasma-chemical deposition from a vapor mixture of C₆H₆ and Ar have been investigated. The growth rate of the coating was measured, which showed a nonlinear dependence on the partial pressure of Ar. The mathematical model of the deposition has been develope...
Збережено в:
| Дата: | 2021 |
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| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2021
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| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/194928 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Growth rate of diamond-like coatings synthesized in RF discharge at various ratios of the concentrations of Ar and C₆H₆ / A.I. Kalinichenko, A.О. Omarov, V.E. Strel’nitskij // Problems of Atomic Science and Technology. — 2021. — № 2. — С. 109-112. — Бібліогр.: 5 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | Diamond-like coatings (DLC) synthesized by plasma-chemical deposition from a vapor mixture of C₆H₆ and Ar have been investigated. The growth rate of the coating was measured, which showed a nonlinear dependence on the partial pressure of Ar. The mathematical model of the deposition has been developed, which qualitatively and quantitatively describes the dependence of the ion flux density and deposition rate on the partial pressure of argon. |
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