Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies
The current paper describes the results of the improvement of a volumetric high-current low-pressure plasma generator. The device was made on the basis of a hollow cathode with a gas-magnetron ignition of the discharge and an auxiliary arc discharge for the cathode heating up to thermionic emission...
Збережено в:
| Дата: | 2022 |
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| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2022
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| Назва видання: | Problems of Atomic Science and Technology |
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| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/195895 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies / V.A. Khomich, A.V. Ryabtsev, V.G. Nazarenko // Problems of Atomic Science and Technology. — 2022. — № 6. — С. 99-102. — Бібліогр.: 11 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
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irk-123456789-1958952023-12-08T12:57:22Z Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies Khomich, V.A. Ryabtsev, A.V. Nazarenko, V.G. Low temperature plasma and plasma technologies The current paper describes the results of the improvement of a volumetric high-current low-pressure plasma generator. The device was made on the basis of a hollow cathode with a gas-magnetron ignition of the discharge and an auxiliary arc discharge for the cathode heating up to thermionic emission temperature. The device was operated at a working gas pressure of 0.1…1 Pa and had an electron concentration of 10¹⁰…5·10¹¹ cm⁻³. It was shown that the addition of the auxiliary electrode after the emission hole of the canoed unit lead to the improvement of generated plasma characteristics. This plasma generator may be used in the processes of ion-plasma technologies (oxidation, nitration in non-hydrogen media), as well as in energy-saving technologies of combined ion-plasma processing of structural materials. Описано результати удосконалення об’ємного сильнострумного генератора плазми низького тиску. Пристрій виготовлено на основі порожнистого катода з газомагнетронним запалюванням розряду та допоміжним дуговим розрядом для нагріву катода до температури термоелектронної емісії. Прилад працює при тиску робочого газу 0,1…1 Па і має концентрацію електронів 10¹⁰…5·10¹¹ cm⁻³. Показано, що додавання допоміжного електрода після емісійного отвору катодного вузла призводять до покращення характеристик генерованої плазми. Даний плазмогенератор може бути використаний в процесах іонно-плазмових технологій (окислення, нітрування в неводневих середовищах), а також у енергозберігаючих технологіях комбінованої іонно-плазмової обробки конструкційних матеріалів. 2022 Article Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies / V.A. Khomich, A.V. Ryabtsev, V.G. Nazarenko // Problems of Atomic Science and Technology. — 2022. — № 6. — С. 99-102. — Бібліогр.: 11 назв. — англ. 1562-6016 PACS: 52.80.Mg DOI: https://doi.org/10.46813/2022-142-099 http://dspace.nbuv.gov.ua/handle/123456789/195895 en Problems of Atomic Science and Technology Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| topic |
Low temperature plasma and plasma technologies Low temperature plasma and plasma technologies |
| spellingShingle |
Low temperature plasma and plasma technologies Low temperature plasma and plasma technologies Khomich, V.A. Ryabtsev, A.V. Nazarenko, V.G. Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies Problems of Atomic Science and Technology |
| description |
The current paper describes the results of the improvement of a volumetric high-current low-pressure plasma generator. The device was made on the basis of a hollow cathode with a gas-magnetron ignition of the discharge and an auxiliary arc discharge for the cathode heating up to thermionic emission temperature. The device was operated at a working gas pressure of 0.1…1 Pa and had an electron concentration of 10¹⁰…5·10¹¹ cm⁻³. It was shown that the addition of the auxiliary electrode after the emission hole of the canoed unit lead to the improvement of generated plasma characteristics. This plasma generator may be used in the processes of ion-plasma technologies (oxidation, nitration in non-hydrogen media), as well as in energy-saving technologies of combined ion-plasma processing of structural materials. |
| format |
Article |
| author |
Khomich, V.A. Ryabtsev, A.V. Nazarenko, V.G. |
| author_facet |
Khomich, V.A. Ryabtsev, A.V. Nazarenko, V.G. |
| author_sort |
Khomich, V.A. |
| title |
Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies |
| title_short |
Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies |
| title_full |
Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies |
| title_fullStr |
Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies |
| title_full_unstemmed |
Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies |
| title_sort |
low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| publishDate |
2022 |
| topic_facet |
Low temperature plasma and plasma technologies |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/195895 |
| citation_txt |
Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies / V.A. Khomich, A.V. Ryabtsev, V.G. Nazarenko // Problems of Atomic Science and Technology. — 2022. — № 6. — С. 99-102. — Бібліогр.: 11 назв. — англ. |
| series |
Problems of Atomic Science and Technology |
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AT khomichva lowpressureuniformplasmageneratorbasedonhollowcathodeforionplasmatechnologies AT ryabtsevav lowpressureuniformplasmageneratorbasedonhollowcathodeforionplasmatechnologies AT nazarenkovg lowpressureuniformplasmageneratorbasedonhollowcathodeforionplasmatechnologies |
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2024-03-31T09:17:48Z |
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2024-03-31T09:17:48Z |
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