Radiation-acoustic effects at diamond-like coating deposition from the flow of hydrocarbon ions and their influence on kinetic processes

• Видавець: Національний науковий центр «Харківський фізико-технічний інститут» НАН України
• Дата: 2023
• Автори: Kalinichenko, O.I., Strel’nitskij, V.E.
• Формат: Стаття
• Мова: English
• Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2023
• Назва видання: Problems of Atomic Science and Technology
• Теми: Physics of radiation and ion-plasma technologies
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/196096
• Цитувати: Radiation-acoustic effects at diamond-like coating deposition from the flow of hydrocarbon ions and their influence on kinetic processes / O.I. Kalinichenko, V.E. Strel’nitskij // Problems of Atomic Science and Technology. — 2023. — № 2. — С. 110-117. — Бібліогр.: 12 назв. — англ.

Based on the model of the nonlocal thermoelastic peak (NTP) the ion generalized to the case of the ion of polyatomic molecule, the acoustic effect of low-energy ion of a hydrocarbon molecule during plasma-ion deposition of diamond-like carbon coating is investigated. The generation of a stress wave takes place as a result of the combined action of mechanisms associated with the rapid transfer of energy, momentum, and additional volume to the NTP volume. The magnitude, shape, and spatial dependence of the stress pulse generated by CH₄, C₂H₂, and C₆H₆ ions have been studied with absorption taken into account. The possibility of accelerating the diffusion of interstitial defects, as well as the possibility of brittle fracture of the coating at the interface with the substrate under the action of acoustic pulses from deposited hydrocarbon ions, is discussed.