High resolution probe-forming system with spherical aberration correction for nuclear microprobe
A probe-forming system based on a separate orthomorphic quadruplet of magnetic quadrupole lenses with a short working distance is considered, allowing the system demagnification to be significantly increased. Three magnetic octupole lenses are used to correct spherical aberrations. The parameters of...
Збережено в:
| Дата: | 2023 |
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| Автори: | , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2023
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| Назва видання: | Problems of Atomic Science and Technology |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/196159 |
| Теги: |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | High resolution probe-forming system with spherical aberration correction for nuclear microprobe / A.G. Ponomarev, S.V. Kolinko, H.E. Polozhii, V.A. Rebrov // Problems of Atomic Science and Technology. — 2023. — № 3. — С. 153-157. — Бібліогр.: 25 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | A probe-forming system based on a separate orthomorphic quadruplet of magnetic quadrupole lenses with a short working distance is considered, allowing the system demagnification to be significantly increased. Three magnetic octupole lenses are used to correct spherical aberrations. The parameters of the octupole corrector are calculated using the matricant method. The focusing properties of the system are determined by means of a probe formation optimization process based on the value of the maximum reduced collimated acceptance. The calculations performed showed the feasibility of such a probe forming system for microanalysis and proton beam writing technique. |
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