Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten
The samples of tungsten with a purity of 99.5 and 99.7% were irradiated with helium ion beams (EHe⁺ = 0.12 MeV). The total sputtering coefficients for the sample depth up to 60 Å from the surface of sample were obtained. It was found that on the surface of tungsten, the number of pits (the flecking...
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| Дата: | 2023 |
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| Автори: | , , , , , , , |
| Формат: | Стаття |
| Мова: | English |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2023
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| Назва видання: | Problems of Atomic Science and Technology |
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| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/196160 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten / O.V. Manuilenko, E.M. Prokhorenko, K.V. Pavlii, B.V. Zajtsev, S.N. Dubniuk, V.V. Lytvynenko, Yu.A. Kasatkin, T.G. Prokhorenko // Problems of Atomic Science and Technology. — 2023. — № 3. — С. 158-163. — Бібліогр.: 26 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
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irk-123456789-1961602023-12-11T13:40:59Z Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten Manuilenko, O.V. Prokhorenko, E.M. Pavlii, K.V. Zajtsev, B.V. Dubniuk, S.N. Lytvynenko, V.V. Kasatkin, Yu.A. Prokhorenko, T.G. Applications and technologies The samples of tungsten with a purity of 99.5 and 99.7% were irradiated with helium ion beams (EHe⁺ = 0.12 MeV). The total sputtering coefficients for the sample depth up to 60 Å from the surface of sample were obtained. It was found that on the surface of tungsten, the number of pits (the flecking effect) significantly exceeds the number of bubbles (the blistering effect). The damage profiles of the surface of tungsten as a result of irradiation with helium ions are calculated. The areas of maximal display of effects of damage are determined. Проведено опромінення зразків вольфраму з чистотою 99,5 і 99,7% пучками іонів гелію (EHe⁺ = 0,12 МeВ). Отримано сумарні коефіцієнти розпилення за глибиною зразка до 60 Å від поверхні зразка. Знайдено, що на поверхні зразків вольфраму кількість ямок (ефект флекінгу) істотно перевищує кількість бульбашок (ефект блістерингу). Пораховані профілі пошкодження поверхні вольфраму в результаті опромінення іонами гелію. Визначено зони максимального прояву руйнівних ефектів. 2023 Article Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten / O.V. Manuilenko, E.M. Prokhorenko, K.V. Pavlii, B.V. Zajtsev, S.N. Dubniuk, V.V. Lytvynenko, Yu.A. Kasatkin, T.G. Prokhorenko // Problems of Atomic Science and Technology. — 2023. — № 3. — С. 158-163. — Бібліогр.: 26 назв. — англ. 1562-6016 PACS: 52.40.HF, 29.27Ac, 621.715:539.376, 87.55N DOI: https://doi.org/10.46813/2023-145-158 http://dspace.nbuv.gov.ua/handle/123456789/196160 en Problems of Atomic Science and Technology Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| topic |
Applications and technologies Applications and technologies |
| spellingShingle |
Applications and technologies Applications and technologies Manuilenko, O.V. Prokhorenko, E.M. Pavlii, K.V. Zajtsev, B.V. Dubniuk, S.N. Lytvynenko, V.V. Kasatkin, Yu.A. Prokhorenko, T.G. Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten Problems of Atomic Science and Technology |
| description |
The samples of tungsten with a purity of 99.5 and 99.7% were irradiated with helium ion beams (EHe⁺ = 0.12 MeV). The total sputtering coefficients for the sample depth up to 60 Å from the surface of sample were obtained. It was found that on the surface of tungsten, the number of pits (the flecking effect) significantly exceeds the number of bubbles (the blistering effect). The damage profiles of the surface of tungsten as a result of irradiation with helium ions are calculated. The areas of maximal display of effects of damage are determined. |
| format |
Article |
| author |
Manuilenko, O.V. Prokhorenko, E.M. Pavlii, K.V. Zajtsev, B.V. Dubniuk, S.N. Lytvynenko, V.V. Kasatkin, Yu.A. Prokhorenko, T.G. |
| author_facet |
Manuilenko, O.V. Prokhorenko, E.M. Pavlii, K.V. Zajtsev, B.V. Dubniuk, S.N. Lytvynenko, V.V. Kasatkin, Yu.A. Prokhorenko, T.G. |
| author_sort |
Manuilenko, O.V. |
| title |
Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten |
| title_short |
Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten |
| title_full |
Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten |
| title_fullStr |
Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten |
| title_full_unstemmed |
Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten |
| title_sort |
influence of helium ions beams with energies 0.12 mev on sputtering process on surface of tungsten |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| publishDate |
2023 |
| topic_facet |
Applications and technologies |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/196160 |
| citation_txt |
Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten / O.V. Manuilenko, E.M. Prokhorenko, K.V. Pavlii, B.V. Zajtsev, S.N. Dubniuk, V.V. Lytvynenko, Yu.A. Kasatkin, T.G. Prokhorenko // Problems of Atomic Science and Technology. — 2023. — № 3. — С. 158-163. — Бібліогр.: 26 назв. — англ. |
| series |
Problems of Atomic Science and Technology |
| work_keys_str_mv |
AT manuilenkoov influenceofheliumionsbeamswithenergies012mevonsputteringprocessonsurfaceoftungsten AT prokhorenkoem influenceofheliumionsbeamswithenergies012mevonsputteringprocessonsurfaceoftungsten AT pavliikv influenceofheliumionsbeamswithenergies012mevonsputteringprocessonsurfaceoftungsten AT zajtsevbv influenceofheliumionsbeamswithenergies012mevonsputteringprocessonsurfaceoftungsten AT dubniuksn influenceofheliumionsbeamswithenergies012mevonsputteringprocessonsurfaceoftungsten AT lytvynenkovv influenceofheliumionsbeamswithenergies012mevonsputteringprocessonsurfaceoftungsten AT kasatkinyua influenceofheliumionsbeamswithenergies012mevonsputteringprocessonsurfaceoftungsten AT prokhorenkotg influenceofheliumionsbeamswithenergies012mevonsputteringprocessonsurfaceoftungsten |
| first_indexed |
2024-03-31T09:18:59Z |
| last_indexed |
2024-03-31T09:18:59Z |
| _version_ |
1796158131455131648 |