Generating of low energy intensive ion streams in conditions of low pressure
In the work the method of forming of low energy ion streams near the sample surface with separating the generation area of plasma and the acceleration area of ion is offered. It allows to lower pressure in acceleration area essentially (0.01 Pa and below). The separating of the areas takes place at...
Збережено в:
| Дата: | 2000 |
|---|---|
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2000
|
| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/78537 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Generating of low energy intensive ion streams in conditions of low pressure / D.V. Zinoviev, A.F. Tseluyko, A.G. Chunadra, N.N. Yunakov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 103-105. — Бібліогр.: 3 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-78537 |
|---|---|
| record_format |
dspace |
| spelling |
irk-123456789-785372015-03-19T03:01:56Z Generating of low energy intensive ion streams in conditions of low pressure Zinoviev, D.V. Tseluyko, A.F. Chunadra, A.G. Yunakov, N.N. Plasma dynamics and plasma-wall interaction In the work the method of forming of low energy ion streams near the sample surface with separating the generation area of plasma and the acceleration area of ion is offered. It allows to lower pressure in acceleration area essentially (0.01 Pa and below). The separating of the areas takes place at the expense of vacuum resistance in a plasma generating device. The dependence of plasma parameters on exterior parameters of the device is determined and the way of the further decreasing of working pressure in the modification area up to 10⁻³ – 10⁻⁴ Pa are shown. 2000 Article Generating of low energy intensive ion streams in conditions of low pressure / D.V. Zinoviev, A.F. Tseluyko, A.G. Chunadra, N.N. Yunakov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 103-105. — Бібліогр.: 3 назв. — англ. 1562-6016 http://dspace.nbuv.gov.ua/handle/123456789/78537 533.915 en Вопросы атомной науки и техники Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| topic |
Plasma dynamics and plasma-wall interaction Plasma dynamics and plasma-wall interaction |
| spellingShingle |
Plasma dynamics and plasma-wall interaction Plasma dynamics and plasma-wall interaction Zinoviev, D.V. Tseluyko, A.F. Chunadra, A.G. Yunakov, N.N. Generating of low energy intensive ion streams in conditions of low pressure Вопросы атомной науки и техники |
| description |
In the work the method of forming of low energy ion streams near the sample surface with separating the generation area of plasma and the acceleration area of ion is offered. It allows to lower pressure in acceleration area essentially (0.01 Pa and below). The separating of the areas takes place at the expense of vacuum resistance in a plasma generating device. The dependence of plasma parameters on exterior parameters of the device is determined and the way of the further decreasing of working pressure in the modification area up to 10⁻³ – 10⁻⁴ Pa are shown. |
| format |
Article |
| author |
Zinoviev, D.V. Tseluyko, A.F. Chunadra, A.G. Yunakov, N.N. |
| author_facet |
Zinoviev, D.V. Tseluyko, A.F. Chunadra, A.G. Yunakov, N.N. |
| author_sort |
Zinoviev, D.V. |
| title |
Generating of low energy intensive ion streams in conditions of low pressure |
| title_short |
Generating of low energy intensive ion streams in conditions of low pressure |
| title_full |
Generating of low energy intensive ion streams in conditions of low pressure |
| title_fullStr |
Generating of low energy intensive ion streams in conditions of low pressure |
| title_full_unstemmed |
Generating of low energy intensive ion streams in conditions of low pressure |
| title_sort |
generating of low energy intensive ion streams in conditions of low pressure |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| publishDate |
2000 |
| topic_facet |
Plasma dynamics and plasma-wall interaction |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/78537 |
| citation_txt |
Generating of low energy intensive ion streams in conditions of low pressure / D.V. Zinoviev, A.F. Tseluyko, A.G. Chunadra, N.N. Yunakov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 103-105. — Бібліогр.: 3 назв. — англ. |
| series |
Вопросы атомной науки и техники |
| work_keys_str_mv |
AT zinovievdv generatingoflowenergyintensiveionstreamsinconditionsoflowpressure AT tseluykoaf generatingoflowenergyintensiveionstreamsinconditionsoflowpressure AT chunadraag generatingoflowenergyintensiveionstreamsinconditionsoflowpressure AT yunakovnn generatingoflowenergyintensiveionstreamsinconditionsoflowpressure |
| first_indexed |
2023-10-18T19:16:40Z |
| last_indexed |
2023-10-18T19:16:40Z |
| _version_ |
1796146479268626432 |