Investigation of helium plasma stream parameters in experiments on surface modification
Processing of different constructional materials with pulsed plasma streams is one of prospective methods of surface modification. The main objection of this study is adjustment of plasma treatment regimes for different materials that allows achieving optimal thickness of modified layer with simulta...
Збережено в:
Дата: | 2005 |
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Автори: | , , , , , , , , |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2005
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Назва видання: | Вопросы атомной науки и техники |
Теми: | |
Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/79783 |
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Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Цитувати: | Investigation of helium plasma stream parameters in experiments on surface modification / A.N. Bandura, O.V. Byrka, V.V. Chebotarev, I.E. Garkusha, M.S. Ladygina, A.K. Marchenko, V.I. Tereshin, S.A. Trubchaninov, A.V. Tsarenko // Вопросы атомной науки и техники. — 2005. — № 2. — С. 104-106. — Бібліогр.: 4 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of UkraineРезюме: | Processing of different constructional materials with pulsed plasma streams is one of prospective methods of surface modification. The main objection of this study is adjustment of plasma treatment regimes for different materials that allows achieving optimal thickness of modified layer with simultaneously minimal value of surface roughness. With use of optical spectroscopy, detailed information about the basic plasma parameters – electron density, electron and ion temperatures, plasma stream duration and velocity, was obtained. Integrated spectra of plasma radiation were analyzed. The majority of helium and impurity spectral lines were investigated on a subject of Stark broadening. Plasma pressure and energy density values measured with piezodetectors and calorimeters are in good agreement with plasma parameters obtained by optical techniques. |
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