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High-productive source of the cathodic vacuum-arc plasma with the rectilinear filter
The design and performance of high productive cathodic vacuum arc plasma source with rectilinear “magnetic island” filter, which is suitable for industrial applications, are briefly described. The device is characterized by achievable output ion current up to 4 A at an arc current of 100 A, Ti coa...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
National Science Centеr “Kharkov Institute of Physics and Technology”, Kharkov, Ukraine
2013
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/79933 |
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