Influence of dust particles on RF-discharge plasma afterglow

• Main Authors: Kravchenko, O.Yu., Maruschak, I.S., Yushchyshena, Yu.V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2015
• Series: Вопросы атомной науки и техники
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: http://dspace.nbuv.gov.ua/handle/123456789/82257

In this paper we report about results of computer simulation by PIC/MCC method of the discharging of dust particles in the plasma afterglow and time dependence of plasma parameters in discharge gap after switching off the voltage. It is shown that discharging of dust particles in the afterglow plasma after switching off voltage of radiofrequency discharge occurs faster in the central part of the electrode gap due to the ion cloud forming and intense recombination of electrons in collisions with dust particles in this area. Moreover, the discharging rate is increasing with increasing of the dust particles density. In the initial stage after the switching off the voltage plasma has a positive potential relative to the electrodes. Eventually, when the electron and ion densities are significantly reduced, the charge of the plasma is determined by the amount of negative dust particles. In this case, the plasma potential is negative relative to the electrodes, which contributes to the effective diffusion of dust particles on the walls of the discharge chamber.